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It is disadvantageous that the surface of the cantilever is barely accessible for. More advantageous is the manufacturing of similar shapes as seen in silicon based microcantilevers. Others describe microcantilevers made from photocurable expoxy materials SU For this a planar process is needed, multiple levels are possible.

Photolithography is necessary and the process is very near to the fabrication to silicon. An additional molding of nanostructures is possible. Tips with pyramidal shape have been molded, to achieve a Scanning Force Microscopy SFM like cantilever with a sharp tip probe able to scan over surfaces and record reliefs and images. SU-8 is a. Other materials seem possible, including sol-gel materials. Polymeric microdevices are fabricated with a so-called LIGA process, or assembly. These processes resemble those already described. Thin polymeric membranes with nanoimprint lithography have been fabricated, but thin membranes are rather difficult to be fabricated with injection molding.

Foil like elements in a hot embossing process have been fabricated. An interesting application is the use of diffraction gratings instead of printed color on toys which make it possible to achieve an appropriate color effect by diffraction without using chemicals. Thin Nickel molds have been used in injection molding machines to add a nanopattern onto dispensing systems using polymeric syringes. Compact Disc injection molding uses as a standard thin Nickel shims which can be exchanged very fast. In production, shim copies rather than the original are used, and are replaced by another copy when degradation sets in.

Instead of fabricating stamp copies in the same hard material as the original, in a specific nanoimprint lithography process developed by Obducat, intermediate polymer stamps are fabricated for every single imprint. This process, called intermediate polymer stamp. IPS , is a two-step process, in which hot embossing onto a hydrophobic polymer foil, such as Zeonor or Topas, transfers the surface relief of the silicon, nickel, or polycarbonate original.


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These foils are used as molds in a simultaneously combined thermal and UV nanoimprint STU process, allowing the complete imprint sequence into UV-curable thermoplastic prepolymers to be performed at a constant temperature. Using polymer stamps, either one-time use of the stamp or multiple use is possible.

Inmold labelling is very common in injection molding: a foil is used to be integrated and backfilled into a macroscopic part. Feeder mechanisms need to align the foil with respect to the mold. Sol-gel fabricated molds have been fabricated in a variety of ways, particularly interesting are hybrid molds which consist of a thin polymeric sol-gel relief in a resist on top of a metal backbone.

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Sol-gel materials used are. Apart from metal, glass and polymer substrates can been used. A surface corrugation is been used being based on stiffening of a membrane in a stencil setup, to enhance the stability of a perforated stencil agains deposition and stress. Cell growth and implants with surface topography is well explored. Most interesting are surfaces which enhance cell growth or even control the diversificaton of stem cells.

A cantilever setup has been built which uses surfaces stress to enhance deflection of a beams. This setup will be used in the context of this patent application to detect the. It is therefore the objective of the present invention to provide a micro-mechanical device that allows to implement an additional functionality in the cantilever- or membrane-like structure.

The specific achievement and invention is a micromechanical device such as a micro-cantilever array or a micro-membrane which is fabricated using polymer injection molding, and which is patterend on one side with a micro- and nanorelief in a controlled way.

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The invention is based on the surface. The specific advantage is given if the foil stamp covers a large part of the mirror side because it serves both as a stamp and a sealing of the molding tool. It can also be applied from reel- to-reel as it is common in inmold-labelling processes.

The microdevice according to the present invention is an element which comprises a body element of a few mm size and a thin membrane or cantilever like element which gains. The device is fabricated by micro-in ection molding with a. By using an additional foil-like mold, functionality is added to the microdevice without major modifications of its shape, outlines and volume. Also mechanical performance stiffness, resonance frequency can be modified by corrugations in the thin areas of the cantilevers or membranes. Due to the flexibility of the process,.

The invention is based on the method for surface patterning of foils. Either without post-processing or with a post-processing step as e.

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Explanation: In nanoimprint lithography the homogeneous thinning of polymer layers is used to generate windows to the underlying substrate. In contrast to this, a thinning of a suspended membrane or a cantilever with surface corrugations or local depressions results in a thinning of the overall membrane or cantilever.

In the thinnest areas, this results in a local removal of material while other areas which have been thicker , stay intact. Thus perforated membranes can be generated, with opened holes; for the invention described here, a foil mold with high pillars would be used to add. These depressions will result in holes after thinning, and the entire membrane can serve as a sieve.

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A device having surface patterns on one side of membrane or cantilever with appropriate size, depth, orientation, to at least two of the effects mentioned in i to iii on the same cantilever, or on neighbouring cantilevers in the same array. This can be done by delamination of a part of the foil stamp, or by transfer of the entire foil onto the device. A specific case is that of a selectively dissolvable stamp, i.

This enables to remove a stamp structure from the cantilever after opening of the molding machine and possibly also after demolding of the entire device. The aim is that structures can be demolded from the fragile cantilever without or with a reduced mechanical force, e. Explanation: If the cantilever is modified by the foil on one side, which is coated with a silane etc.

Si02 containing Ag for. Using delamination of a metal foil from a polymeric carrier a metallization can be generated, e. Preferred methods for the foil stamp handling are: i The foil stamp can be placed on the mirror unit, by gluing, lamination, clamping;. Preferred methods for the pattern transfer are:. A part of the foil stamp can be transferred by pattern transfer onto the injection molded part e.

Si02 containing Ag for sterilization purposes see HeiQ ; in the same way, coatings or chemical agents could be transferred which enable a reaction with the polymer melt or with chemicals applied after molding; also chemicals for surface activation, crosslinking; Typical process size ranges are: i Polymeric cantilever normally have the following.

Cantilevers normally are defined a long beam with constant thickness and width over the entire length, emanating from the body to the tip. Different forms exist, V-Shape, double cantilevers etc.

This patent applies for all possible forms. The body has a length between 1 to 10 mm, widths of 1 to 10 mm, thicknesses of 0. In contrast to.

Fabrication approaches for generating complex micro- and nanopatterns on polymeric surfaces.

This is either a bridge a. This patent applies for all possible forms of membranes, as long as the presented process can be applied. In contrast to cantilevers, membranes are spanning over much larger areas, i. Nano and MicroStructured Polymer Surfaces for. Bioinspired Patterned Adhesives. Patterned Materials and Surfaces for Optical Applications.

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Colloidal Polymer Patterning. She then joined the Max-Planck-Institut fur Polymerforschung as Marie Curie Fellow to work in the field of surface chemistry and nanotechnology. He has been Visiting Professor at Stanford University and Massachusetts Institute of Technology and maintains strong links to the international materials community.